精密光栅位移传感器的若干信号处理问题研究

On Some Problems of Signal Processions for Grating Transducers

光栅传感器是一类精密传感器 ,在直线位移或角位移的测量中有广泛的应用。但在工业应用中 ,除各种电磁干扰外 ,还有微小机械振动产生的干扰以及温度误差等 ,使测量精度大大下降。本文提出了在后续处理电路和信号处理方法上解决这一问题 ,提高传感器精度、分辨率和抗干扰能力的综合方法 ,如分频、温度补偿、定时器飞读和计数脉冲确认机制等。在实际使用中发现 ,应用这些方法的测量系统的稳定性、抗干扰能力和精度等指标都得到提高。

Grating sensor is a type of accurate sensor which is widely used for linear and angular displacement measurements. However, the accuracy is reduced due to magneto electric interferences, mechanical vibrations and temperatures. In this paper, several approaches such as frequency division, temperature composition, flying reading, and counting enable control are present to solve the problems. It is found that the properties of robust, anti interfering, sensitivity and accuracy are promoted.