Sol-Gel法制备SnO_2透明导电薄膜

MANUFACTURE TIN OXIDE TRANSPARENT CONDUCTING THIN FILM BY USING Sol-Gel TECHNIQUE

采用 Sn Cl4 · 5 H2 O为起始原料 ,无水乙醇为溶剂 ,Sb Cl3为掺杂剂 ,采用溶胶 -凝胶法在玻璃基板上成功制得了 Sn O2 薄膜 ,并通过 XRD、SEM及薄膜光学。

SnO2 thin film with different dopant concentration was deposited on soda-glass substrate by the Sol-Gel technique, using inorganic salt SnCl4*5H2O as starting material, SbCl3 as dopant, alcohol as solvent. The thin film was evaluated by using electric property measuring, optical property measuring, XRD and SEM methods.