薄膜测厚验证QCM质量敏感性的方法研究

Determination of QCM mass sensitivity by measuring the thin-film thickness

石英晶体微量天平(QCM)是测量气相薄膜沉积质量的精密仪器。QCM质量和频率的相互作用受到众多不确定因素的影响,因此需要进行验证以取得更为精确的结果。文章从石英晶片的基本理论出发,以薄膜测厚为基础,研究了气相沉积石英晶体微量天平差频变化率和沉积厚度变化率成线性关系,阐述了线性关系是验证石英晶体微量天平的关键,并对测厚验证质量敏感性的可行性进行了分析。

QCM is a precision mass detector for measuring the gas phase thin-film deposition. Because the correlation between frequency and mass can be affected by many uncertain factors, the sensitivity of QCM often plays an important role in securing accurate results. In this paper, from the QCM theory and the measurement of the thin-film thickness, the linear relation and the method for determination of the mass sensitivity of the gas phase thin-film QCM are discussed, where the linear relation is the key. The feas...