材料力学性能纳米压入测试仪器发展综述

A Review of Nanoindentation Measuring Instruments for Materials Mechanical Properties

综述了材料力学性能纳米压入测试仪器的发展现状。阐述了纳米压入测试技术的发展历程;从驱动、载荷测量和位移测量3方面对目前材料力学性能纳米压入测试仪器的基本结构进行了比较分析;介绍了材料力学性能纳米压入测试仪器集成技术,包括影响压入深度测量精度的集成技术、观测技术、大载荷模块和高温试验模块等;最后,对未来材料力学性能纳米压力测试仪器的发展趋势作了展望。

The development and the present situation of nanoindentation instruments are briefly summarized in this paper.The development progress of nanoindentation test in recent years is stated.Then,from aspects of driver,load measuring and displacement measuring,the structures of some representative nanoindentation instruments are introduced and compared.And the integrated technology of nanoindentation instruments is introduced,which includes technology of affecting depth measuring precision,observation,big load mo...