摘要
采用序贯采样法检测洁净室粒子浓度是否达到等级,省时又省力。举例说明了序贯采样法的采样规程。
Sequential sampling method is time and manpower saving for determing whether the particle concentration in a cleanroom meets the specified classification limit. The procedures of sequential sampling is explained with examples.
出处
《洁净与空调技术》
2010年第3期15-19,共5页
Contamination Control & Air-Conditioning Technology
关键词
洁净度等级
预期计数
实测计数
Cleanliness classification
Expected count
Observed count
