自由支撑银薄膜的形貌演化规律及机理研究

Morphological Evolution Behaviors and Mechanisms of Free Sustained Ag Films

采用直流磁控溅射方法在硅油基底上沉积出具有自由支撑边界条件的金属银薄膜系统,研究了银薄膜在大气环境中的表面形貌演化规律及其物理机理。实验发现银薄膜在真空状态下基本稳定,但在大气环境中发生强烈的收缩效应,使得薄膜开裂,其表面覆盖率不断降低。分析表明这一动态演化过程基本满足指数衰减规律,并可用薄膜内应力的不断释放加以解释。随着银薄膜的不断收缩,薄膜表面可呈现出异常丰富的褶皱形貌:在薄膜边界附近呈现基本垂直于边界的直线状条纹结构;而在薄膜中间区域,将形成二次起皱的扭曲状花样和无序网格状褶皱形貌。从单轴应力和双轴应力理论的角度出发,对各类奇特的褶皱形貌进行了细致的分析和讨论。

A silver(Ag) film system with free sustained edge condition has been deposited on silicone oil sub-strates by a DC-magnetron sputtering method,and the surface morphological evolution behaviors and mecha-nisms are systematically studied.The experiment shows that the Ag film can keep stable in vacuum condition but contracts strongly after the sample is exposed to the atmosphere,which makes the film break and its sur-face coverage decreases successively.This evolution behavior can be traced to an exponential a...