摘要
The inverse design of electron lens is realized by two different methods in this paper. One is damped least square method and the other is the artificial neural network method. Their merits and defects are discussed according to our calculation results in the paper. In the condition of selecting the learning samples properly, the artificial neural network has obvious advantages in the inverse design of electron lens. It is an effective method to solve the inverse design problem in the electron optic system.
The inverse design of electron lens is realized by two different methods in this paper. One is damped least square method and the other is the artificial neural network method. Their merits and defects are discussed according to our calculation results in the paper. In the condition of selecting the learning samples properly, the artificial neural network has obvious advantages in the inverse design of electron lens. It is an effective method to solve the inverse design problem in the electron optic system.
基金
the Scientific Research Foundation for Returned Overseas Chinese Scholars, State EducationCommission.