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Inverse Design of Electron Lens

Inverse Design of Electron Lens
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摘要 The inverse design of electron lens is realized by two different methods in this paper. One is damped least square method and the other is the artificial neural network method. Their merits and defects are discussed according to our calculation results in the paper. In the condition of selecting the learning samples properly, the artificial neural network has obvious advantages in the inverse design of electron lens. It is an effective method to solve the inverse design problem in the electron optic system. The inverse design of electron lens is realized by two different methods in this paper. One is damped least square method and the other is the artificial neural network method. Their merits and defects are discussed according to our calculation results in the paper. In the condition of selecting the learning samples properly, the artificial neural network has obvious advantages in the inverse design of electron lens. It is an effective method to solve the inverse design problem in the electron optic system.
出处 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2001年第1期49-52,共4页 系统工程与电子技术(英文版)
基金 the Scientific Research Foundation for Returned Overseas Chinese Scholars, State EducationCommission.
关键词 Electron optics Least squares approximations Neural networks Numerical methods Optical design Electron optics Least squares approximations Neural networks Numerical methods Optical design
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参考文献2

  • 1Tu Yan,Zhang Xiong.Application of Neural Networks Technique to Estimate the Effects of Main Lens Dimension-Error onthe Spots[].Journal of Southeast University.1998
  • 2Chu H C,Munro E.Computerized Optimization of the Electron Optical Performance of Electron Beam Lithography SystemsUsing the Damped Least Squares Method[].Optics Letters.1982

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