摘要
利用多种气体分析仪,采取四级质谱定量分析技术,分别测定He、N2、Ne、CF4、Kr等气体在不同入口压力下通过不同的人造漏孔的漏率;经过对同工况下气体间漏率比对,研究气体间漏率等效关系。试验结果表明:气体在不同工况下处于不同的流动领域,且其漏率与入口压力存在着不同的数值关系,经分析试验结果得出适用于气体全流域的漏率经验公式;气体间漏率的等效关系在低漏率及高漏率端始终呈平滑的线性关系,而在中间的过渡区域呈四或五次多项式关系;但是CF4与He的漏率等效性呈线性关系,显示出多原子分子与单、双原子分子在粒子输运过程中存在着差异。试验结果为示漏工质漏率指标的制定提供了基础数据。
The leak rates of He,N2,Ne,CF4 and Kr were measured under different inlet pressures with different leaks by the technology of quantitative analysis of quadrupole mass spectrometry in the multi-gas analyzer;and the leak rate equivalent relationship was established by comparing leak rates between different gases under the same working condition.The experimental results show that the relationship between the gas leak rate and the pressure is different when the gas is under different working conditions with different flow types.From the result of He,a leak rate expression is found to be the same with all flow types.The leak rate equivalent relationship of gas is derived with a linear trend under high or low leak rate boundary conditions and with four or five order polynomial trend in between them.However,the leak rate relationship between CF4 and He is linear in all data areas,which shows some differences between polyatomic molecule and monatomic molecule.The results of experiment provide some basic data for establishing the leak rate index of tracer gas.
出处
《航天器环境工程》
2009年第6期535-539,498,共5页
Spacecraft Environment Engineering
关键词
密封管路
漏率
等效性
质谱分析
leak rate
equivalent relationship
mass spectrometry