KM6低温泵新型测温系统研制

A new temperature measurement system for cryopumps in KM6

低温泵是KM6环境模拟器最主要的高真空获得设备,其二级冷头(板)的温度变化对低温泵的抽气性能有直接的影响,因此对低温泵内部实施全面、准确的温度监测对于保障低温泵的稳定、可靠运行具有重要的意义。文章详细介绍了新研制的低温泵测温系统的软、硬件结构、测温元器件的选型及安装工艺、系统测试等内容。该新型测温系统已经成功投入使用,能够准确地提供试验过程中低温泵内部的温度状况,大大提高了低温泵运行异常时的分析手段,为试验的顺利进行提供了有力的保障。

Cryopump is the most important equipment to obtain high vacuum for KM6 The temperature variation on the second level cryohead has a direct effect on cryopump’s vacuum,therefore it is important to monitor the temperature variations inside cryopump extensively and accurately for stable operation of the pump. This paper discusses the development of related software and hardware,the selection of measurement components,their installations,and the system test. The new system has been used for thermal vacuum test successfully in providing useful data,as are essential for fault analyses.