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Radiation-induced defects in different silicon (111) wafers by 400 keV electron irradiation

Radiation-induced defects in different silicon (111) wafers by 400 keV electron irradiation
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出处 《Rare Metals》 SCIE EI CAS CSCD 2012年第3期290-295,共6页 稀有金属(英文版)
基金 supported by Major Foundation for Development of Science and Technology of China Academy of Engineering Physics (No. 2007A02001)
关键词 SiO2-Si(111) interface low-energy electron energy deposition XPS spectrum EPR spectrum radiation effect SiO2-Si(111) interface low-energy electron energy deposition XPS spectrum EPR spectrum radiation effect
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参考文献10

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