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Effect of Cold Deformation and Annealing on Microstructure of Al-Ti Alloy Target for Sputter Deposition

Effect of Cold Deformation and Annealing on Microstructure of Al-Ti Alloy Target for Sputter Deposition
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摘要 The microstructure of the Al Ti alloy was studied.It was found that Al x Ti( x <5.0wt%) alloy consists of two phases,the solid solution of titanium in aluminum and the intermetallic compound Al 3Ti.The alloy was deformed by rolling and heat treated.The results show that the second phase precipitates are broken and refined in the matrix by large amount of cold work and crystalline grains are refined by annealing after the cold work.Deformation and heat treatment can improve the distribution of second phase of precipitates in the matrix to certain extent. The microstructure of the Al Ti alloy was studied.It was found that Al x Ti( x <5.0wt%) alloy consists of two phases,the solid solution of titanium in aluminum and the intermetallic compound Al 3Ti.The alloy was deformed by rolling and heat treated.The results show that the second phase precipitates are broken and refined in the matrix by large amount of cold work and crystalline grains are refined by annealing after the cold work.Deformation and heat treatment can improve the distribution of second phase of precipitates in the matrix to certain extent.
出处 《Rare Metals》 SCIE EI CAS CSCD 2000年第3期187-191,196,共5页 稀有金属(英文版)
关键词 AL Ti alloy TARGET MICROSTRUCTURE Al Ti alloy,Target,Microstructure
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