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Fabrication and its characteristics of hard coating Ti-Al-N system prepared by DC magnetron sputtering 被引量:3

Fabrication and its characteristics of hard coating Ti-Al-N system prepared by DC magnetron sputtering
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出处 《Rare Metals》 SCIE EI CAS CSCD 2012年第2期178-182,共5页 稀有金属(英文版)
基金 supported by "University Innovation and Research Training Program (China)" (No. 2009003) the Natural Science Foundation of Jiangsu Province (No.BK2011252) the Industry Science and Technology Supported Plan of Changzhou (No. CE20110012)
关键词 Ti-Al-N DC magnetron sputtering phase transition HARDNESS Ti-Al-N DC magnetron sputtering phase transition hardness
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  • 1Oliver W C,Pharr G M.An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiment[J].J Mater Res,1992,7(6):1564~1583.
  • 2PalDey S,Deevi S C.Single layer and multilayer wear resistant coatings of (Ti,Al)N:a review.Mater Sci Eng A,2003,342:58~59.
  • 3Musil J,Hruby.Superhard nanocomposite Ti1-xAlxN films prepared by magnetron sputtering.Thin Solid Films,2000,365:104~109.
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  • 5Gredic T,Zlatanovic.Plasma deposition of (Ti,Al)N coatings at various magnetron discharge power levels.Surf Coat Technol,1991,48:25~30.
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  • 7Mientus R,Ellmer K.Reactive DC magnetron sputtering of elemental targets in Ar/N2 mixtures:relation between the discharge characteristics and the heat of formation of the corresponding nitrides.Surf Coat Technol,1999,116-119:1093~1101.
  • 8Han Z H,Tian J W,Lai Q X et al.Effect of N2 partial pressure on the microstructure and mechanical properties of magnetron sputtered CrNx films.Surf Coat Technol,2003,162:189~193.
  • 9RU Qiang,HU Shejun,HUANG Nacan,ZHAO Lingzhi,QIU Xiuli,HU Xianqi.Properties of TiAICrN coatings prepared by vacuum cathodic arc ion plating[J].Rare Metals,2008,27(3):251-256. 被引量:9
  • 10许国栋,王凤娥.高温钛合金的发展和应用[J].稀有金属,2008,32(6):774-780. 被引量:78

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