水热法制备SrTiO_3功能陶瓷薄膜

Preparationi of Strontium Titanate Functional Ceramic Thin Film by Hydrothermal Method

采用水热法技术于250℃条件下直接在金属钛片上制备了钙钛矿结构的SrTiO3晶态薄膜,讨论了温度对薄膜形成的影响.采用X射线衍射(XRD)分析了薄膜的晶相;扫描电镜(SEM)研究了薄膜的表面形貌;X射线光电子能谱(XPS)分析了薄膜的成分与价态.结果表明水热反应温度是影响薄膜结晶的重要条件.

Strontium titanate (SrTiO_3) thin films were directly prepared on titanium substrate by hydrothermal method at 250 ℃, and the influence of hydrothermal temperatures on the formation of SrTiO_3 thin films was discussed. The crystal phase of the thin film was analyzed by XRD, the morphology of the thin films was researched by SEM, the composition and the valence of the thin films were analyzed by XPS too. The measurement results reveal that the hydrothermal temperature is the vital condition affecting the crystallization of strontium titanate thin film.