一种压电步进微动转台的研究

Study on a kind of the rotary stepping piezoelectric micro-platform

介绍了一种基于尺蠖原理的回转式步进压电微动转台。借助柔性机械结构,将压电陶瓷的微位移以角度方式输送出来。在结构设计方面,采用柔性铰链放大结构,夹紧器和驱动器均采用双驱动器结构,实现推-拉接力运动。配以适当的四路驱动信号,实现了压电微动转台的单步、多步连续匀速转动。最后对样机进行了实验测试。实验结果表明,所设计的压电步进微动转台结构紧凑、分辨力高且运动稳定。同时,动体没有缠绕,使得驱动器可以在任意位置启动,并可在360°范围内连续匀速转动。在频率为5Hz、幅值为30V驱动电压下测得最小步距小于3″,在频率为40Hz幅值为160V的驱动电压下速度达到430.4″/s。

A kind of rotary piezoelectric platform(PZT),based on Inchworm motion,is presented.By the flexible machinery,the displacement of the piezoelectric actuators is transformed into angle.The clampers and actuators which are made of piezoelectric ceramic are both disposed in symmetrical relationship.By clamping or releasing of clampers and extending or retracting of actuators,it could achieve a kind of push-pull relay movement.In this way,the movement of platform is smooth and continuous.With the proper four-channels driving signals,the motor is moved linearly with single step or multi-step.The performances of the motor are tested through experiments.The results show that the equipment has compact structure,high resolution and stable movement.Meanwhile,there is no winding,the driver can start at any position and has uniform rotation in range of 0~360°.The minimal step is less than 3″ when the frequency is 5 Hz,the voltage is 30 V,the moving speed can reach 430.4″/s at the frequency of 40 Hz,the voltage of 160 V.