铜粉含量对亲水性固结磨料抛光垫加工性能的影响研究

Influence of copper content on the machining performance of hydrophilic fixed abrasive pad

通过向亲水性固结磨料抛光垫中添加铜粉,改善抛光垫的抛光性能,研究铜粉添加量对抛光垫的理化特性及加工K9光学玻璃的材料去除率和工件表面质量的影响。结果表明:随着铜粉添加比例的增加,抛光垫的硬度增加,其材料去除速率呈现先增大后减小的趋势,当铜粉质量分数为5%时,抛光垫的材料去除速率达到最大值58.18 nm/min。同时加工后K9玻璃表面粗糙度也对应地呈现出先增大后减小的趋势,粗糙度Sa最大值为9.28 nm,最小值为2.53 nm。

Copper powder was added to the hydrophilic fixed abrasive pad to improve its polishing performance.The influence of copper content on the pad′s physical and chemical properties,as well as on its material removal rate and surface roughness in polishing K9 optical glass,was studied.The results showed that with the increase of addition amount of copper,the pad′s hardness increased,and its material removal rate first increased then decreased;when the copper content was 5%(mass fraction),the pad′s removal rate reached the maximum value(58.18 nm /min).Meanwhile,the surface roughness Sa of polished K9 optical glass also showed the same trend of first increasing then decreasing,the maximum value of Sa was 9.28 nm and the minimum value of Sa was 2.53 nm.