固结磨料研磨抛光K9玻璃的超精密加工工艺研究

Study on ultra-precision machining of K9 glass by fixed abrasive lapping and polishing

采用PHL-350型平面高速研磨抛光系统,通过固结磨料研磨抛光方法进行了超精密加工K9玻璃试验研究。探讨了不同粒径和不同磨粒研磨抛光垫在加工中对K9玻璃材料去除率和表面质量的影响。获得了高效率、低成本、高质量的K9玻璃的超精密加工工艺:首先使用M20/30金刚石研磨垫研磨,然后使用3μm CeO2抛光垫抛光。加工后K9玻璃的表面粗糙度优于RMS 0.6 nm,微观损伤少。

PHL-350 High-speed lapping & polishing system was employed in ultra-precision machining experiment of K9 glass by fixed abrasive lapping and polishing.Influence of fixed abrasive pad(FAP) with different particle size and different abrasive on material removal rate and surface quality of the K9 glass was studied.An ultra-precision machining process of K9 glass with high efficiency,low cost and high quality was obtained: first M20/30 diamond FAP was used for lapping,then 3 μm CeO2 FAP was used for polishing.A good surface of K9 glass with surface roughness RMS less than 0.6 nm and very few micro scratches or damages was achieved.