摘要
采用金属有机分解法在ITO/玻璃衬底上制备出晶粒尺寸均匀且致密的BiFe0.98-xTi0.02ZnxO3薄膜。XRD结果表明,掺入适量Zn2+有助于薄膜(012)取向晶粒的生长。压电原子力显微镜测试结果显示,BiFe0.965Ti0.02Zn0.015O3薄膜具有最大的压电常数d33(123 pm/V),比BiFe0.98Ti0.02O3薄膜压电响应提高50%。
Uniform and dense BiFe0.98-xTi0.02ZnxO3 thin films were deposited on ITO/glass substrates by using a metal organic decomposition process.XRD results indicate that doping Zn2+ ions moderately favors the growth of(012)-oriented grains.The piezoelectric coefficient d33 measured by the piezoelectric AFM system for BiFe0.965Ti0.02Zn0.015O3 film gets the largest value of(123 pm/V),which is 50% higher than that of BiFe0.98Ti0.02O3 film.
出处
《济南大学学报（自然科学版）》
CAS
北大核心
2013年第3期225-228,共4页
Journal of University of Jinan(Science and Technology)
基金
国家自然科学基金(50972049)
关键词
金属有机分解法
铁酸铋薄膜
低价离子掺杂
()取向
压电响应
metal organic decomposition
BFO thin film
low-valence ion doping
(012)orientation
piezoelectric response
