溶胶凝胶法混合掺杂SnO_2薄膜的返回特性研究

Study on return properties of co-doped SnO_2 thin films prepared by Sol-Ge

在常温、加温和光照三种环境下,通过采用溶胶凝胶法在玻璃基片上制备成的混合掺杂Cu_TiO2和Fe_TiO2的SnO2薄膜在乙醇、丙酮两种气氛作用下进行气敏反应前后的光反射谱测试,研究薄膜的返回特性。研究分析表明,掺杂SnO2薄膜在常温返回特性不理想,在100℃加温3分钟和红外线光照10分钟后,掺杂SnO2薄膜测试光反射谱表明返回特性表现良好,能在较短时间和较宽波段内返回。

Under the three environments,normal temperature,heat and illumination,we test the light reflection spectra of the co-doped SnO2 thin films which used the Sol-Gel method on the glass substrate to prepare Cu_TiO2_SnO2 and Fe_TiO2_SnO2 thin films,in ethanol,acetone to study the properties of the film to return.Research and analysis shows that the return properties of the co-doped SnO2 thin films is not deal at room temperature environment.After 100℃ heat for 3 minutes and infrared light for 10 minutes,the return characteristic is good.