氧化锆在高纯气体测氧中的应用

The application of Zirconia in trace oxygen analysis of high purity gases

本文首先简要介绍了常用的测定高纯气体中氧气含量方法的工作原理、应用、优点以及局限性,如比色法,黄磷发光法,原电池法,浓差电池法,光纤法,气相色谱法等。随后重点针对氧化锆在高纯气体测氧中的应用现状和进展进行了总结,归纳了氧化锆微氧测氧仪存在的问题和今后发展的重点。

In this paper,the analytical principles,applications,advantages and limitations of the test methods for the tracing oxygen content in high purity gases,such as Colorimetry,Phosphor chemiluminescence method,Galvanic method,Concentration cell method,Fiber Optic method,Gas Chromatography etc.,are briefly introduced.The application status and progress of zirconia that in analysis of trace oxygen are reviewed in details.Besides,this paper also points out some problems existed in the Zirconia Trace Oxygen Analyzer and make forecast for the development in future.