基于纵向激励的Fe基非晶带加速度传感器

Fe-based amorphous ribbon accelerometer based on longitudinal excitation

为了提高传感器的性能,该文选取Fe基非晶带材作为敏感材料,采用纵向激励的驱动方式,优化设计了差分型的敏感元件。针对敏感元件的结构形式和驱动方式设计了相应的脉冲信号发生电路、峰值检波电路、无源低通滤波电路和电压跟随电路。对基于巨应力阻抗效应的加速度传感器样机的动静态性能进行了实验标定和数据分析。测试结果表明:在±50 g的量程范围内,传感器的灵敏度为34.85 mV/g,线性度误差为0.56%,重复性误差为2.67%,迟滞误差为0.87%,达到了实际加速度测量的要求。

To improve the performances of sensors,the sensitive components in differential-type are optimally designed with Fe-based amorphous ribbon as the sensitive material and the longitudinal excitation as the driving mode.The pulse excitation circuit,peak-value detector,passive low-pass filter circuit and voltage follower are designed to match up with the structure and the driving mode of the sensitive material.The static and dynamic performances of the accelerometer prototype based on the giant stress-impedance(GSI)effect are experimentally calibrated and analyzed on data.The test results show that in the acceleration field of ±50 g,the sensitive is 34.81 mV/g,the linearity error is 0.56%,the repeatability error is 2.67% and the hysteresis error is 0.87%,which attains the requirement in actual measurement of accelerated velocity.