沉积法制备纳米TiO_2薄膜

Preparation of Nano-TiO_2 Thin Film by Sendimentation Method

利用TiO2胶体在石英玻璃表面沉积制备TiO2薄膜,用分光光度计测量TiO2薄膜的吸光度,研究沉积时间、TiO2胶体浓度、镀膜次数对TiO2薄膜的沉积吸附过程和等效膜厚的影响,讨论纳米TiO2沉积吸附的类型。结果表明,最大等效膜厚随着TiO2胶体浓度的增大而增加;最佳镀膜次数与TiO2胶体浓度无关,随着沉积时间的延长而减少;用气体吸附的B.E.T.和Langmuir吸附理论分析的纳米TiO2在石英玻璃上的沉积过程与实验结果相符。

Nano-TiO2 thin film was prepared by TiO2 colloid on quartz glass surface by deposition method.The effect of TiO2 colloid concentration,sedimentation time,and number of layers on the effective film thickness and sedimentation behavior was investigated.Deposition adsorption types of TiO2 nano-particles were discussed.The results show that the maximum effective film thickness increases with the increase of TiO2 colloid concentration.The optimum coating times have no concern with TiO2 colloid concentration,which decrease with prolongate of sedimentation time.The sedimentation of TiO2 nano-particles on quartz glass analyzed by the gas adsorption theory of B.E.T.and Langmuir isothermal adsorption conforms to experimental results.