微电子机械系统(MEMS)器件中的普通物理学原理

Micro-Electro-Mechanical Systems Device and Physics

简要介绍了微电子机械系统,一个新兴的高新技术领域,并以微机械陀螺和加速度计结构为例说明了物理学基本原理在MEMS器件中的应用。

A brief introduction of an emerging high technology,Micro-Electro-Mechanical Systems(MEMS),is given in this paper.By the way of analyzing the functions of two typical MEMS devices,Micro-Gyroscope and Micro-Accelerometer,how the fundamental Physics is applied in MEMS is pictured out.