高精度长光栅动态检测技术

The Technology for Dynamic Measurement of High-Accuracy Long Grating

本文根据双频激光干涉测量原理,提出了一种实现高精度长光栅动态测量的新方法,介绍了新颖的激光信号处理电路、计算机接口电路和测试软件.系统所能达到的测量指标为:最大测量长度1m,最小测量间隔为0.1mm,分辨率为0.01μm,测量速度为1m/5min,测量精度为±0.25μm(全长).本系统不仅用于计量长光栅动态检测,还可用于感应同步器、磁栅、线纹尺等长度计量元件的动态检测.

In this paper, based on the principle of the double-frequency laser interference measurement, a new method for the dynamic measurement of high accuracy linear grating. In the method, the novel laser signal procssing circuit, computer interface circuit and measuring software are described. The measurement specifications in the method are that the longest measurement length is 1 meter, the shortest measurement interval is 0.1 millimeter, the resolution is 0.01 micrometer, the highest speed of measurement is 0.2 meter per minute and tne accuracy of measurement is ±0.25 micrometer (with the longest measurement length). The method is used not only in the measurement of grating, but also in the dynamic measurement of other metrological length components.