硅静电和准静电微马达的研制

Study on Si Electrostatic and Electroquasistatic Micromotors

本文介绍的静电可变电容型和准静电感应型两种马达的转子直径均为16μm.研制出了槽宽为4μm、槽深为0.3μm的泵入式螺旋槽微止推空气轴承,以减小摩擦力.

The electrostatie variable-capacitance micromotor and electroqua-sistatic induction micromotor have been discussed. Both micromotors having rotors with the diameter of 160 μm have been fabricated by the surface micromachining of polysilicon. In order to reduce the friction in micromotors, the application of the gas-lubricated bearing to micromotors is propo-ssed. An aerodynamic in-pumping spiral grooved thrust micro-bearing with groove width of 4 μm and groove deep of 300 nm :has been designed and used in tde micromotors.