NO_2高选择性气敏元件及其表面修饰

The Gas Sensor of NO_2 High Selectivity and Its Surface Decorating

本文报导了用WO_3气敏材料制作高灵敏度、高选择性N0_2气敏元件的研究结果,并利用修饰技术在元件特性的改善和提高方面做了初步实验,对元件敏感机理也做了初步探讨.结果表明,元件对N0_2具有高灵敏、高选择特性,元件阻值合适且响应恢复快,并有良好的抗湿度特性,通过对元件气氛处理、掺杂等表面修饰技术可明显提高元件的气敏特性.

This paper reports the research results of high sensitivity and high selectivity of NO; gas sensor with WO3 sensitivity material, and doing some experiments in order to improve and raise the sensor characters with surface decorating. The results show that this gas sensor has high sensitivity and selectivity for NO2 gas, The resistance of the sensor is suitable for using and it has better humidy-resistance character. The sensor sensitivity mechanism has been initially discussed.