摘要
介绍一种研制成功的容膜式压力传感器。该传感器具有高的精度,高的灵敏度,性能稳定,抗干扰能力强,用途广泛。
A capacitance diaphragm type pressure sensor is developed. The sensor, which has high precision and sensitivity, stable performance and strong anti-interference ability, is widely applied.
出处
《传感器技术》
CSCD
1993年第1期18-20,共3页
Journal of Transducer Technology
关键词
电容换能器
弹性膜片
压电传感器
The capacitance -diaphragm type sensor Differential - capacitive type transducer Elastic diaphragm
