硅电容式触觉传感阵列及相关技术

Silicon Capaeitive Tactile Transducer Matrix and Its Compatible Technology

从目前硅电容式触觉传感阵列的研究现状出发,详细分析了各种阵列单元结构、加工工艺、读出电路的设计和性能特征等。最后探讨了今后触觉传感阵列的研究趋向和发展前景。

On the basis of the present research situation of silicon capacitive tactile transducer matrix, various cell structure, micromachining technology, the design of readout circuit and performance of transducer are analysed in detail. Finally, the trend and the prospects oF tactile matrix research are discussed.