摘要
设计了一款基于压电陶瓷驱动、利用柔性铰链铰接的微结构加工快刀伺服系统.用理论计算和有限元分析软件对柔性铰链进行了优化和分析,并进行了实际加工和测试.测试结果表明该系统能达到最大的加工行程为60 μm;并且在0～39 μm的加工行程范围内运动频响可达到150 Hz.
This paper designed a fast tool servo( FTS) device based on piezoelectric ceramic and jointed by flexible hinge. The flexible hinge was analyzed and optimized both by the theoretical calculation and finite element analysis software; and it had been physical processed and tested. The testing results indicated that this FTS system can reach a travel range for 60μm; and the frequency response reach 150 Hz within 39 μm travel range.
出处
《制造技术与机床》
北大核心
2014年第6期43-47,共5页
Manufacturing Technology & Machine Tool
关键词
微结构加工
压电陶瓷
柔性铰链
快刀伺服
有限元分析
micro structure machining
piezoelectric ceramic(PZT)
flexure hinge
fast tool servo(FTS)
finite ele-ment analysis
