摘要
采用三相全帧帧转移结构和常规的CCD工艺,设计并研制了一种高速摄像用256×256元高帧频可见光CCD成像器件。器件光敏元采用MOS结构,尺寸为10μm×10μm,4信号抽头输出,占空比100%。测试结果表明,器件工作波长为0.4～1.1μm,光灵敏度为0.05lx(峰值波长处,积分时间40ms),帧速为500帧/秒,动态范围大于等于54dB,响应非均匀性小于等于2%。
By using three-phase full-frame frame transfer structure and common CCD technology, a 256×256 high frame-rate visible light CCD used in high speed photography is designed and fabricated. The light sensitive pixel structure of the device is MOS structure. The device is characterized by pixel size of 10 μm×10 μm, four-tap output and fill-factor of 100%. The test results show that the sensitivity of 0.05 lx(at peak wavelength and integration time of 40 ms), fram rate of 500 frame/s, dynamic range greater than of equal to 54 dB and response inuniformity less than of equal to 2% are obtained at the wavelength of 0.4～1.1 μm.
出处
《半导体光电》
CAS
CSCD
北大核心
2004年第4期262-263,280,共3页
Semiconductor Optoelectronics
