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多孔硅-PMMA/DR1复合膜制备方法的研究 被引量:2

Preparation Method of Porous Silicon-PMMA/DR1 Composite Films
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摘要  用直接浸泡、匀胶机涂布和超声波三种方法在多孔硅中嵌入了聚甲基丙烯酸甲酯/分散红1(PMMA/DR1),制备出多孔硅有机材料复合薄膜。研究了多孔硅孔隙率、匀胶机转速和PMMA甲苯溶液浓度等参量对PMMA/DR1嵌入多孔硅的影响。分析了嵌入PMMA/DR1后多孔硅的荧光及样品稳定性的变化情况。 Immersion, ultrasonic agitation and spin-coating methods are used to prepare the porous silicon-polymethylmethacrylate based dispersive red one (PMMA/ DR1) composite films. The effects of the porosity of porous silicon, rotary speed of spin-coating and methyl benzene solution concentration on inserting of PMMA/DR1 into the porous silicon are investigated. Photoluminescence spectra and stability of the samples after inserting PMMA are analyzed.
出处 《半导体光电》 CAS CSCD 北大核心 2004年第4期281-283,共3页 Semiconductor Optoelectronics
基金 国家自然科学基金资助项目(60067001) 中国科学院"西部之光"项目
关键词 多孔硅 薄膜 PMMA/DR1 孔隙率 porous silicon film PMMA/DR1 porosity
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