一种同轴腔微波等离子体反应器的设计及电磁场计算

Calculation and design of the electromagnetic field in a coaxial resonator microwave plasma reactor

设计了一种同轴腔微波等离子体反应器,推导了谐振腔内电磁场分布表达式,对谐振腔中的电磁分布进行了数值计算,得到与理论推导结果相对应的场强分布图。同时采用HFSS软件对本文设计的同轴谐振腔等离子体反应器进行电磁场的模拟仿真,优化出谐振腔的最优尺寸和场强分布图。软件模拟与理论推导结果吻合,说明了本方案设计的可靠性。本文设计的谐振腔固有品质因数可达17800,峰值场强高达9.29×103V/(m·W),且分布均匀,微波能量集中,有利于反应气体产生放电。

In this paper,a new microwave plasma reactor for a coaxial resonator has been designed. The electromagnetic distribution in the resonant cavity has been calculated,and the resonant cavity electromagnetic field distribution formula and the corresponding field intensity distribution have been obtained. The electric field in the coaxial resonator has been simulated and optimized by using HFSS software. The simulated results are consistent with theoretical calculations,and are therefore reasonable and reliable. The new resonator has valuable properties such as a high intrinsic Q-factor of 17800,a high field strength of 9. 29 × 103V/(m·V) and good concentration of microwave energy,which make it easier for the reactant gas to discharge.