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Investigations of ZnO thin films deposited by a reactive pulsed laser ablation 被引量:2

Investigations of ZnO thin films deposited by a reactive pulsed laser ablation
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摘要 Highly transparent ZnO thin films were deposited at different substrate temperatures by pulsed laser deposition in an oxygen atmosphere. The thin films were characterized by various techniques including X-ray diffraction, scanning electron microscopy, optical absorption, and photoluminescence. We demonstrated that oriented wurtzite ZnO thin films could be deposited at room temperature using a high purity zinc target. Variable temperature photoluminescence revealed new characteristics in the band edge emission. The underlying mechanism for the observed phenomena was also discussed. Highly transparent ZnO thin films were deposited at different substrate temperatures by pulsed laser deposition in an oxygen atmosphere. The thin films were characterized by various techniques including X-ray diffraction, scanning electron microscopy, optical absorption, and photoluminescence. We demonstrated that oriented wurtzite ZnO thin films could be deposited at room temperature using a high purity zinc target. Variable temperature photoluminescence revealed new characteristics in the band edge emission. The underlying mechanism for the observed phenomena was also discussed.
出处 《Science China(Technological Sciences)》 SCIE EI CAS 2009年第1期99-103,共5页 中国科学(技术科学英文版)
关键词 thin films PULSED laser deposition optical property ZINC OXIDE thin films pulsed laser deposition optical property zinc oxide
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