摘要
A model of curvature and tip deflection of multilayer thermal cantilever actuators is derived.The sim-plified expression received from the model avoids inverting complex matrices enhances understanding and makes it easier to optimize the structure parameters.Experiment is performed,the modeled and experimental results demonstrate the validity of the model,and it also indicates that Young's module makes great contribution to the deflection;therefore,thin layers cannot be ignored arbitrarily.
A model of curvature and tip deflection of multilayer thermal cantilever actuators is derived. The simplified expression received from the model avoids inverting complex matrices enhances understanding and makes it easier to optimize the structure parameters. Experiment is performed, the modeled and experimental results demonstrate the validity of the model, and it also indicates that Young’s module makes great contribution to the deflection; therefore, thin layers cannot be ignored arbitrarily.
基金
Supported by the National Natural Science Foundation of China (Grant No. 60576053)
Hi-Tech Research and Development Program of China (Grant No. 2007AA03Z333)
