摘要
The aluminum oxide(AlOx)coatings were deposited on poly(ethylene terephthalate)(PET)surface by reactive magnetron sputtering for improving its barrier property.With O2 flux increasing,three modes including metallic mode,transition mode and oxide mode exist in sputtering.The properties of the aluminum oxide(AlOx)coatings prepared at different modes were discussed.Also,the influences of oxygen flux on the stoichiometry,structure,gas permeation of the coatings were investigated.The chemical composition of AlOx films fabricated in transition mode is different as oxygen flux varies slightly,and the gas barrier property is better as the stoichiometry is closer to 1.5 with oxygen flux increasing.The coating uniformity,roughness and particle size depend remarkably upon oxygen flux.The coatings deposited at oxide mode have a good barrier performance to oxygen and water,and the permeability to oxygen decreases by sixty times and water vapor ten times compared with uncoated
The aluminum oxide(AlOx)coatings were deposited on poly(ethylene terephthalate)(PET)surface by reactive magnetron sputtering for improving its barrier property.With O2 flux increasing,three modes including metallic mode,transition mode and oxide mode exist in sputtering.The properties of the aluminum oxide(AlOx)coatings prepared at different modes were discussed.Also,the influences of oxygen flux on the stoichiometry,structure,gas permeation of the coatings were investigated.The chemical composition of AlOx films fabricated in transition mode is different as oxygen flux varies slightly,and the gas barrier property is better as the stoichiometry is closer to 1.5 with oxygen flux increasing.The coating uniformity,roughness and particle size depend remarkably upon oxygen flux.The coatings deposited at oxide mode have a good barrier performance to oxygen and water,and the permeability to oxygen decreases by sixty times and water vapor ten times compared with uncoated PET
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2012年第S1期268-271,共4页
Rare Metal Materials and Engineering
基金
Key Projects in the National Science&Technology Pillar Program during the Eleventh Five-year Plan Period(2006BAD05A05)
