摘要
研制了一种基于体微机械加工技术的悬板式风速传感器.传感器由可动极板和固定极板构成,通过测量传感器的输出电容变化量来检测风速.基于流体力学原理对传感器进行了理论分析.将制作的传感器封装在印刷电路板(PCB)上,并置于小型风洞内进行测试.测试结果说明所研制的传感器能够实现0~15.5 m/s范围内的风速测量,风速越大,传感器的灵敏度越高.传感器的输出电容变化量和风速之间具有二次函数关系,与风速平方之间具有线性关系,线性度为8.1%.
Based on bulk micromachining technology,a novel micro electro mechanical system(MEMS) based cantilever plate wind speed sensor was developed.The designed sensor consists of a movable plate and a fixed plate.The information of wind speed was obtained through detection of the output capacitance change of the sensor.The proposed sensor was analyzed based on fluid mechanics theory.The fabricated sensor was encapsulated on printed circuit board(PCB) and tested in a small wind tunnel.Test result shows that the sensor has a full scale measurable range from 0 m/s to 15.5 m/s as well as higher sensitivity in high wind speed.Moreover,there is a quadratic relationship between the capacitance change and the wind speed.There is also a linear relationship between the capacitance change and the square of wind speed,with the linearity of 8.1%.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2009年第5期423-427,共5页
Nanotechnology and Precision Engineering
关键词
风速传感器
悬板
微机械
电容
wind speed sensor
cantilever plate
micromachining
capacitance
