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Dynamics analysis and experiment on the fishtailing type of valveless piezoelectric pump with rectangular vibrator 被引量:10

Dynamics analysis and experiment on the fishtailing type of valveless piezoelectric pump with rectangular vibrator
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摘要 In recent years, the research and development of piezoelectric pumps have become an increasingly popular topic. Minimization, structure simplification and stronger output become the focus of piezoelectric pumps’ research due to its possible application in MEMS technology. The valveless fishtailing piezoelectric pump, neither a volumetric nor a rotating pump, was invented according to the bionics of fish swimming. With assumption that the head of the fish is fixed while its tail is swinging, fluid would flow toward the end of the tail, achieving the function of a valveless pump. This type of pumps creates a new branch for the piezoelectric pump research, which is proposed for the first time in this paper. The relationship between the flow rates and vibrating frequencies was derived from the interaction between the vibrator and fluid. Numerical simulations with FEM software were conducted to study the first and second vibration modes of the piezoelectric vibrator. The results showed that the maximum amplitude of the vibrator was 0.9 mm at the frequency of 76 Hz for the first vibration mode, while the maximum amplitude of the vibrator was 0.22 mm at the frequency of 781 Hz for the second vibration mode. Experiments were conducted with the Doppler laser vibration measurement system, and the results were compared to those of the FEM simulation. It was shown that in the first vibration mode the piezoelectric vibrator reached its maximum amplitude of about 0.9 mm at the driving frequency of 49 Hz, which gives the flow rate of 2.0 mL/min, in the second vibration mode, the maximum amplitude was about 0.25 mm at the frequency of 460 Hz with the flow rate being 6.4 mL/min. In recent years, the research and development of piezoelectric pumps have become an increasingly popular topic. Minimization, structure simplification and stronger output become the focus of piezoelectric pumps’ research due to its possible application in MEMS technology. The valveless fishtailing piezoelectric pump, neither a volumetric nor a rotating pump, was invented according to the bionics of fish swimming. With assumption that the head of the fish is fixed while its tail is swinging, fluid would flow toward the end of the tail, achieving the function of a valveless pump. This type of pumps creates a new branch for the piezoelectric pump research, which is proposed for the first time in this paper. The relationship between the flow rates and vibrating frequencies was derived from the interaction between the vibrator and fluid. Numerical simulations with FEM software were conducted to study the first and second vibration modes of the piezoelectric vibrator. The results showed that the maximum amplitude of the vibrator was 0.9 mm at the frequency of 76 Hz for the first vibration mode, while the maximum amplitude of the vibrator was 0.22 mm at the frequency of 781 Hz for the second vibration mode. Experiments were conducted with the Doppler laser vibration measurement system, and the results were compared to those of the FEM simulation. It was shown that in the first vibration mode the piezoelectric vibrator reached its maximum amplitude of about 0.9 mm at the driving frequency of 49 Hz, which gives the flow rate of 2.0 mL/min, in the second vibration mode, the maximum amplitude was about 0.25 mm at the frequency of 460 Hz with the flow rate being 6.4 mL/min.
出处 《Science China(Technological Sciences)》 SCIE EI CAS 2010年第12期3241-3247,共7页 中国科学(技术科学英文版)
基金 supported by the National Natural Science Foundation of China (Grant Nos. 50775109, 51075201, 50735002) Open Foundation for the National Key Laboratory of the Numerical Manufacturing Equip-ment and Technology (Grant No. DMETKF2009002)
关键词 PIEZOELECTRIC PUMP valveless fishtailing RECTANGULAR VIBRATOR DYNAMICS analysis EXPERIMENT piezoelectric pump valveless fishtailing rectangular vibrator dynamics analysis experiment
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