摘要
Magnetically soft Fe-Co-based nanocrystalline alloy films were produced by two preparation methods:One using a new energetic cluster deposition technique and another using a conventional magnetron sputtering technique.Their structural,static magnetic properties and high-frequency magnetic characteristics were investigated.In the energetic cluster deposition method,by applying a high-bias voltage to a substrate,positively charged clusters in a cluster beam were accelerated electrically and deposited onto a negatively biased substrate together with neutral clusters from the same cluster source,to form a high-density Fe-Co alloy cluster-assembled film with good high-frequency magnetic characteristics.In the conventional magnetron sputtering method,only by rotating substrate holder and without applying a static inducing magnetic field on the substrates,we produced Fe-Co-based nanocrystalline alloy films with a remarkable in-plane uniaxial magnetic anisotropy and a good soft magnetic property.The obtained Fe-Co-O,Fe-Co-Ti-N,and Fe-Co-Cr-N films all revealed a high real permeability exceeding 500 at a frequency up to 1.2 GHz.This makes Fe-Co-based nanocrystalline alloy films potential candidates as soft magnetic thin film materials for the high-frequency applications.
Magnetically soft Fe-Co-based nanocrystalline alloy films were produced by two preparation methods:One using a new energetic cluster deposition technique and another using a conventional magnetron sputtering technique.Their structural,static magnetic properties and high-frequency magnetic characteristics were investigated.In the energetic cluster deposition method,by applying a high-bias voltage to a substrate,positively charged clusters in a cluster beam were accelerated electrically and deposited onto a negatively biased substrate together with neutral clusters from the same cluster source,to form a high-density Fe-Co alloy cluster-assembled film with good high-frequency magnetic characteristics.In the conventional magnetron sputtering method,only by rotating substrate holder and without applying a static inducing magnetic field on the substrates,we produced Fe-Co-based nanocrystalline alloy films with a remarkable in-plane uniaxial magnetic anisotropy and a good soft magnetic property.The obtained Fe-Co-O,Fe-Co-Ti-N,and Fe-Co-Cr-N films all revealed a high real permeability exceeding 500 at a frequency up to 1.2 GHz.This makes Fe-Co-based nanocrystalline alloy films potential candidates as soft magnetic thin film materials for the high-frequency applications.
基金
supported by the National Natural Science Foundation of China (Grant Nos.50671087,50971108)
the National Outstanding Youth Science Foundation of China (Grant No.50825101)
the Intellectual Cluster Project of the Ministry of Education,Culture,Sports,Science,and Technology,Japan,Aichi Prefecture,Nagoya City and Aichi Science and Technology Foundation
