摘要
Nanolithography is a patterning technique for the fabrication of nano-scale structures.A promising method of nanolithography known as scanning probe lithography has particularly extensive applications for its high resolution,high reliability,and simple operation.In this paper,a novel electrothermally actuated cantilever with integrated heater,thermal conductor and actuator for scanning probe lithography is proposed.Cantilevers are designed in an 8×4 array.Analytical models are presented to simulate the temperature distribution,deflection and thermal crosstalk of the cantilever array.This structure is successfully fabricated.It is demonstrated that this structure can produce a tip deflection of 16.9 μm at an actuation current of 5.5 mA and the thermal crosstalk between the cantilevers is neglected.
Nanolithography is a patterning technique for the fabrication of nano-scale structures.A promising method of nanolithography known as scanning probe lithography has particularly extensive applications for its high resolution,high reliability,and simple operation.In this paper,a novel electrothermally actuated cantilever with integrated heater,thermal conductor and actuator for scanning probe lithography is proposed.Cantilevers are designed in an 8×4 array.Analytical models are presented to simulate the temperature distribution,deflection and thermal crosstalk of the cantilever array.This structure is successfully fabricated.It is demonstrated that this structure can produce a tip deflection of 16.9 μm at an actuation current of 5.5 mA and the thermal crosstalk between the cantilevers is neglected.
基金
supported by the National Natural Science Foundation of China (Grant No.60576053)
Hi-Tech Research and Development Program of China (Grant No.2007AA03Z333)
