应用于微电机的共烧多层压电陶瓷的制备及分析

Process and Analysis of Multilayer Piezoelectric Ceramic for Micro-motor

设计了一种新型棒板复合结构微电机,并对应用于微电机的共烧多层压电陶瓷进行了设计、制备、极化及性能分析。本文中使用Pb(Mg1/3Nb2/3)O3-Pb(Ni1/3Nb2/3)O3-Pb(ZrTi)O3低烧瓷料,d33=300 pC/N,机电耦合系数KP约为0.70~0.74,TC=185℃,设计制备了尺寸为8.5 mm×1.2 mm,d33=3000 pC/N的共烧多层压电陶瓷器件。应用该多层压电陶瓷驱动的微电机尺寸为14.0 mm×12.1 mm,谐振频率为31.34 kHz,最低驱动电压为2 V,相应输出力为10 mN,在10 V电压下性能趋于稳定,响应时间为3.2 ms,输出力为85 mN。而在其他因素不变的条件下,单层压电陶瓷块体驱动的电机最低驱动电压为10 V,相应输出力为7 mN。通过本文研究得出,共烧多层压电陶瓷应用于超声微电机具有可行性,且与单层压电陶瓷块体驱动的电机相比具有驱动电压低和输出力大的优越性。

A new kind of micro-motor with stick-board structure has been designed and assembled.The design,process,polarization and analyses of multilayer piezoelectric ceramic for micro-motor were discussed.Using Pb(Mg1/3Nb2/3)O3-Pb(Ni1/3Nb2/3)O3-Pb(ZrTi)O3 with d33=300 pC/N,electromechanical coupling factor KP=0.70-0.74,TC=185 ℃,multilayer piezoelectric ceramic with 8.5×1.2 mm2 in size,and d33=3000 pC/N has been made.The micro-motor driven by multilayer piezoelectric ceramic is 14.0×12.1 mm2 in size,and the resonance frequency is 31.34 kHz,the lowest driving voltage is 2 V,accordingly the output force is 10 mN.The property of the motor stabilizes when the voltage comes to 10 V,with the response time at 3.2 ms,the output force at 85 mN.In contrast,with the environment well controlled in which all other factors are constant except for the change of the ceramic from multilayer structure to a single layer block,the lowest driving voltage changes into 10 V under which the output force is 7 mN.In this research,we can come to the conclusion that co-fired multilayer piezoelectric ceramics can be used into micro-motors,bring advantages such as lower driving voltage and bigger output force.