基于PSD的导轨直线度测量

Straightness error measurement of a slideway based on position sensitive detector

设计了2种检测系统测量直线导轨的直线度.检测系统1利用随导轨运动的平面镜二维转角表征导轨的俯仰角和偏摆角的误差,这些角度误差通过光学系统在PSD上以位移的形式被记录下来,分析计算位移与角度的关系可得俯仰角和偏摆角.检测系统2利用随导轨运动的棱镜系统将俯仰角和滚转角的误差以位移的形式记录在PSD上,通过去除检测系统1测得的俯仰角的影响可求得滚转角.实验测量了500mm长导轨俯仰角、偏摆角和滚转角的最大偏差分别为3.22,′1.16′和5.88.′分析了实验系统误差对于测试结果的影响,结果表明,测试精度可达0.2.″

Two test systems are designed to measure the straightness error of a slideway.In system one a mirror is mounted on a moving stage on the slideway.The two-dimensional rotation angle of the mirror demonstrates the yaw and pitch angle error of the slideway according to the movement of the mirror.These angle errors are recorded with position sensitive detector(PSD) in the form of displacement,and the relationship between the displacement and the angle is calculated to obtain the yaw and pitch angle.In system two the yaw and roll angle errors are recorded with PSD in the form of displacement by prisms moved with the slideway.The effect of the yaw angle is subtracted to obtain the roll angle.The yaw,pitch and roll angle of a 500mm long slideway are tested and the maximal deviations are 3.22′,1.16′and 5.88′.The effect of system error on the experimental results is analyzed.It demonstrates that the accuracy of the method can reach 0.2″.