Up-to-date issues and strategies for developing nanometrology standards

Up-to-date issues and strategies for developing nanometrology standards

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摘要 Unbroken chain of traceability is currently unsettled issues for developing national/ international nanometer scale metrology standards. The present paper will address

作者 Yan FANG1, Xinju Yang2 Zhanghai Chen2 1 Zhong Shan Hospital,Fudan University, Shanghai XuHui Region 200032 136 Yi Xue Yuan Road 2 Fudan University, Shanghai YangPu Region 200433 220 Han Dan Road

出处《生物物理学报》 CAS CSCD 北大核心 2009年第S1期171-172,共2页 Acta Biophysica Sinica

基金 Yan Fang acknowledges research grants from Shanghai Technology Committee (STC) 03JC14020 &0452nm085 National Science Foundation of China (NSFC) 30470409 Shanghai Xu Hui Region of Science and Technology Committee RCT2008010

关键词 NANOMETROLOGY Methods STANDARDS TRACEABILITY Nanometrology Methods Standards Traceability

分类号 TB383.1 [一般工业技术—材料科学与工程]

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1.Traceability NIST Policy and Supplementary Materials[]..2008

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生物物理学报

2009年第S1期

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Up-to-date issues and strategies for developing nanometrology standards

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