Effect of TiO_2 Seed Layer on 0.7Pb(Mg_(0.33)Nb_(0.67))O_3-0.3PbTiO_3 Thin Films Deposited by Radio Frequency Magnetron Sputtering

Effect of TiO_2 Seed Layer on 0.7Pb(Mg_(0.33)Nb_(0.67))O_3-0.3PbTiO_3 Thin Films Deposited by Radio Frequency Magnetron Sputtering

下载PDF

导出

摘要 We have grown PbMg1/3Nb2/3O3-PbTiO3(PMN-PT) thin films by radio frequency(RF) sputtering deposition at 550 ℃-650 ℃ on Pt/Ti/SiO2/Si and TiO2/Pt/Ti/SiO2/Si substrates.The phase compositions and microstructure of thin films were characterized by X-ray diffraction(XRD) and scanning electric microstructure(SEM).The effect of the TiO2 seed layer on PMN-PT films was studied. We have grown PbMg1/3Nb2/3O3-PbTiO3(PMN-PT) thin films by radio frequency(RF) sputtering deposition at 550 ℃-650 ℃ on Pt/Ti/SiO2/Si and TiO2/Pt/Ti/SiO2/Si substrates.The phase compositions and microstructure of thin films were characterized by X-ray diffraction(XRD) and scanning electric microstructure(SEM).The effect of the TiO2 seed layer on PMN-PT films was studied.

作者王俊明费维栋

机构地区 School of Materials Science & Engineering

出处《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2009年第S1期17-19,共3页 武汉理工大学学报（材料科学英文版）

关键词 PMN-PT radio frequency TiO2 seed layer PMN-PT radio frequency TiO2 seed layer

分类号 TG174.4 [金属学及工艺—金属表面处理]

引文网络
相关文献

参考文献6

1Levoska J,,Tyunina M,Sternberg A,et al.Structural Charac- terization of Relaxor Ferroelectric PbMg1/3Nb2/3O3-PbTiO3 Thin Film Heterostructures Deposited by Pulsed Laser Abla- tion. Appl. Phys. a-Mater . 2000
2Gong W,Li JF,Li LT.Texture Control of Sol-Gel Derived Pb (Mg1/3Nb1/2)O3-PbTiO3 Thin Films Using Seeding Layer. Journal of the American Ceramic Society . 2004
3Ho SK,Hau FF,Wong KH.Enhanced Dielectric Properties of [Pb (Mg1/3Nb2/3)O3]0.9-PbTiO3]0.1 Thin Films Grown on BaPbO3 Perovskite Electrode. Japanese Journal of Applied Physics . 2004
4Li WZ,Xue JM,Miao JM.0.67Pb (Mg1/3Nb2/3)O3 -0.33PbTiO3 Thin Films Derived from RF Magnetron sputtering. Ceramics International . 2004
5Laha A,Masyda S,Morimoto A,et al.Role of La0.5Sr0.5CoO3 Template Layers on Dielectric and Electrical Properties of Pulsed-Laser Ablated Pb (Nb2/3Mg1/3)O3-PbTiO3 Thin Films. Thin Solid films . 2003
6Detallea M,Wanga G,Remiensa D,et al.Comparison of Structural and Electrical Properties of PMN-PT Films Depos- ited on Si with Differentbottom Electrodes. Journal of Crystal Growth . 2007

1陈晋,樊慧庆,邱少君,王志银.两步无机盐-凝胶法制备PMN-PT弛豫铁电陶瓷粉体[J].稀有金属材料与工程,2007,36(A01):105-107.
2王文文,姜全振,范宪勇,郝继功,张燕杰,徐志军.溶胶-凝胶法制备0.85Pb(Mg_(1/3)Nb_(2/3))O_3-0.15PbTiO_3铁电陶瓷及其性能研究[J].聊城大学学报（自然科学版）,2009,22(2):36-39. 被引量：7
3GAO Haiyong ZHUANG Huizhao XUE Chengshan WANG Shuyun DONG Zhihua HE Jianting.Fabrication of ZnO films by radio frequency magnetron sputtering and annealing[J].Rare Metals,2005,24(3):267-271. 被引量：3
4杨英惠（摘译）.半固态铸造法使铝零件成本降低[J].现代材料动态,2007(11):9-9.
5YANG Qinghui ZHANG Huaiwu LIU Yingli.Study of magnetic and magneto-optical properties of heavily doped bismuth substitute yttrium iron garnet (Bi∶YIG) film[J].Rare Metals,2006,25(z1):557-561. 被引量：2
6Zhao, Xuelian, Jiang, Dan, Yu, Shengwen, Cheng, Jinrong.Structure and electrical properties of PZT/LNO/PT multilayer films on stainless steel substrates[J].Rare Metals,2012,31(3):272-275. 被引量：1
7A.LEMIEUX,J.LANGLAIS,D.BOUCHARD,X.GRANT CHEN.Effect of Si,Cu and Fe on mechanical properties of cast semi-solid 206 alloys[J].Transactions of Nonferrous Metals Society of China,2010,20(9):1555-1560. 被引量：8
8屈晓田,李莉,李丽霞.PbTiO_3纳米粉体的制备与X射线衍射分析[J].山西大学学报（自然科学版）,2006,29(3):280-282. 被引量：7
9巢敏雯,贺霖.精确钢板测厚优化轧制模型控制的研究与应用[J].中国计量,2008(10):82-83.
10徐现刚,黄柏标,任红文,刘士文,蒋民华.MOCVD Growth of GaAs / Al_xGa_(1-x) As Superlattices[J].Rare Metals,1994,13(1):13-18.

Journal of Wuhan University of Technology(Materials Science)

2009年第S1期

浏览历史

内容加载中请稍等...

Effect of TiO_2 Seed Layer on 0.7Pb(Mg_(0.33)Nb_(0.67))O_3-0.3PbTiO_3 Thin Films Deposited by Radio Frequency Magnetron Sputtering

参考文献6

相关作者

相关机构

相关主题

浏览历史