辉光等离子放电体在表面合金化技术中的研究

Study on Glow Discharge Plasma in Surface Alloying

辉光等离子放电体直接影响着材料表面合金化时的电压、气压及温度分布从而影响到材料表面的均匀性、组织结构与性能特征。本工作利用发射光谱分析法对表面合金化技术中辉光等离子放电体进行了研究,通过玻尔兹曼方程式和谱线展宽法求得在不同工艺条件下辉光等离子体的电子温度、电子密度。分析了电压、气压对电子温度、电子密度的影响。结果表明:电子温度随工作电压的升高,工作气压的增大先减少后增大,然后又减少;电子密度在放电电压500~1000V,放电气压30~100Pa时是1021m-3在1012~1025m-3范围内,表明该辉光放电体属于典型的异常辉光等离子放电。

Since the various factors including voltage,gas pressure and temperature influence on structure and properties of material surface,a novel technique has been successful developed to evaluate the glow discharge plasma in surface alloying by optical emission spectroscopy.Electron temperature and density are obtained through calculating with Boltzmann equation and spectroscopy lines method.Meanwhile,the effects of voltage,gas pressure and temperature are also analyzed.The results show that the electron temperature decreased initially with the rising of voltage and gas pressure,and afterwards increased which appears periodic variation.The electron density is about 1021m-3 in a range 1012-1025m-3of discharge voltage 500-1000V,gas pressure 30-100Pa,thus the above mentioned glow discharge plasma belongs to a typical abnormal one.