基于线性离子束技术的镁合金表面类金刚石膜的制备与性能研究

Preparation and Properties of Diamond-like Carbon Film on Magnesium Alloy Based on Linear Ion Beam Technique

为了提高AZ31镁合金的力学性能和耐蚀性能,采用线性离子束技术在其表面沉积了类金刚石薄膜。分别利用原子力显微镜和扫描电子显微镜观察了薄膜的表面形貌和截面形貌,利用X射线衍射分析了薄膜的相结构,利用X射线光电子能谱分析了薄膜中元素的价态。利用纳米压痕仪和显微硬度计考察了镁合金镀膜后的表面硬度。利用极化曲线考察了镀膜镁合金在3.5%(质量分数)氯化钠溶液中的耐腐蚀性能。结果表明,利用线性离子束可以获得光滑致密的类金刚石膜,镀膜后镁合金的表面硬度和耐蚀性能得到显著提高。

Linear ion beam technique was used to deposit diamond-like carbon film on AZ31 magnesium alloy in order to improve the mechanical property and corrosion resistance of magnesium alloy.Atomic force microscope and scanning electron microscope were applied to observe the surface morphology and cross section morphology of the film,respectively.X-ray diffraction was used to analyze the phase structure and X-ray photoelectron spectroscopy was used to analyze the chemical state of elements.Nano-indenter and microhardness meter were used to evaluate the surface hardness of the coated magnesium alloy.Polarization curve was applied to evaluate the corrosion resistance of the coated magnesium alloy in 3.5%(mass fraction) NaCl solution.The results show that a smooth and dense DLC film can be obtained by using linear ion beam technique and it improved the surface hardness and corrosion resistance of magnesium alloy greatly.