多轴精密机械手关键技术研究

Research on the Key Technology of Multiple Axes Precision Mechanical Manipulator

随着科技的进步和市场需求的剧增,半导体器件的生产(如半导体激光、LED等)必须步入大规模机械化进程才能满足要求。而半导体器件的自动化生产必须解决的瓶颈问题,就是要实现半导体TO管座从其运输包装盒中向焊接半导体芯片、金属线及管帽等工装夹具中快速转移运动,实现快速转移的主要手段之一为采用多轴精密机械手。论述了多轴精密机械手的总体设计方案,机械结构设计及测控系统设计中的关键技术。同时,研究了以多轴控制器配合光电传感器实现准闭环控制的一种方法。

Along with the rapid progress of modern technology and the leap of market demand,the production of semiconductor devices must be brought into wide-scale mechanization course.The key problem of the automatic production of semiconductor devices is to solve the transfer of the TO tube between the packing device with the processing device. In order to fast transfer the TO tube,a multi-axle precision mechanical manipulator is used.The general design of the multiple axes precision mechanic manipulator is stated,and the key technology of the mechanical structure and the measuring control system are studied.