摘要
引言随着微电子工业的迅速发展,对超净高纯试剂的需求量越来越大,其纯度要求也越来越高。超净高纯试剂是超大规模集成电路制作过程中的关键性基础化工材料之一,主要用于芯片的清洗和腐蚀,它的纯度和洁净度对集成电路的成品率。
Choline chloride is one of the raw materials to produce high-pure choline.The choline chloride solution contains many kinds of metal ions such as Na^+,K^+,Mg^(2+),Ca^(2+)and so on.Metal ion has a bad influence on the quality of high-pure choline.WU64-H resin was used to eliminate the metal ions in choline chloride.The effects of transformation agent,flow rate and concentration were investigated.Experimental result indicated that,the electron-grade tetramethylammonium hydroxide was the best transformation agent,the best flow rate was 5 times as bed volume rate in an hour and the optimal concentration was 2 mol·L^(-1).Under these optimal conditions,the concentrations of metal ions were significantly decreased.Choline was prepared by electrolysis.The current density was 1000 A·m^(-2)and the temperature was 50℃.After electrolysis,the contents of metal ions were below 100μg·L^(-1),and came up to the requirements.
出处
《化工学报》
EI
CAS
CSCD
北大核心
2008年第S1期105-109,共5页
CIESC Journal
关键词
氯化胆碱
离子交换树脂
提纯
电解
choline chloride
ion exchange resin
purification
electrolysis