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Mn掺杂GaN基稀磁半导体材料制备和特性研究 被引量:1

Study on the Fabrication and Properties of GaN-Based Diluted Magnetic Semiconductors
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摘要 利用金属有机物化学气相沉积法在蓝宝石衬底上生长了Mn掺杂GaN基稀磁半导体材料。原子力显微镜研究表明,少量的Mn在样品表面起到活性作用。X射线衍射和喇曼散射研究表明,当Mn的掺杂浓度很低(<2.7%)时并没有观察到第二相的出现,当Mn的掺杂浓度达到3.9%时观察到了第二相。采用光学测试得到了由于Mn杂质引入杂质能级和缺陷而产生一个很宽的发射和吸收谱。 The Ga1-xMnxN DMS materials were grown on c-sapphire substrates by metalorganic chemical vapor deposition.Surface structure was characterized by atomic force microscopy and Mn as a surfactant was detected.Crystalline quality was measured by X-ray diffraction and Raman scattering.None of second phases were detected for these samples at low(<2.7%)Mn concentrations,but the second phases were observed when the Mn doping concentration was 3.9%.An emission band and an absorption band were detected by optical measurements methods.They are both attributed to some Mn-related levels.
出处 《半导体技术》 CAS CSCD 北大核心 2008年第S1期150-153,共4页 Semiconductor Technology
基金 国家"973"重点基础研究项目(2006CB6049) 国家"863"高技术研究发展计划(2006AA03A103 2006AA03A118 2006AA03Z411) 国家自然科学基金(60721063 60676057 60731160628) 江苏省创新学者攀登项目(BK2008019)
关键词 金属有机物化学气相沉积 稀磁半导体 锰掺杂 X射线衍射 MOCVD diluted magnetic semiconductors Mn-doped XRD
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参考文献8

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同被引文献14

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  • 8朱宝明.雷达将采用氮化镓元器件[J].电子工程信息,2008(4):15-15. 被引量:1
  • 9赵小宁,李秀清.国外军事和宇航应用宽带隙半导体技术的发展[J].半导体技术,2009,34(7):621-625. 被引量:8
  • 10中科院微电子所研制成功毫米波GaN功率器件[J].稀土信息,2010,16(2):15-15. 被引量:1

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