摘要
概述了离子注入、离子束沉积、等离子喷涂、离子镀、等离子体增强化学气相沉积、等离子体化学热处理和双层辉光离子渗金属等等离子体表面技术的基本原理和最新进展,并给出了部分典型实例。
The essential principle, the latest development and some typical ap plications of plasma surface technology are discussed, such as ion implantation, ion beam deposition, plasma arc sputtering, ion plating, plasma enhanced chemi cal vapor deposition, plasma chemical heat treatment and double glow surface all oying some typical examples are given.
出处
《航空精密制造技术》
北大核心
2002年第4期7-11,共5页
Aviation Precision Manufacturing Technology
