摘要
Fe-N/TiN multilayers (MLs) with different thickness of TiN layers and 20nm thickness ofFe-N layers deposited by DC magnetron sputtering technique were studied. The structure andcomposition of MLs were characterized with low-angle X-ray diffraction (LXRD), Augur depth pro-file and X-ray diffraction (XRD). The hardness and reduced elastic modulus of these multilayerswere studied using a nano-hardness tester (NHT). The bonding strength between the MLs and thesubstrate was measured using a nano-scratch tester (NST). Effects of the thickness of the TiNlayer on critical load, hardness and reduced elastic modulus of the MLs were studied.
Fe-N/TiN multilayers (MLs) with different thickness of TiN layers and 20nm thickness of Fe-N layers deposited by DC magnetron sputtering technique were studied. The structure and composition of MLs were characterized with low-angle X-ray diffraction (LXRD), Augur depth pro- file and X-ray diffraction (XRD). The hardness and reduced elastic modulus of these multilayers were studied using a nano-hardness tester (NHT). The bonding strength between the MLs and the substrate was measured using a nano-scratch tester (NST). Effects of the thickness of the TiN layer on critical load, hardness and reduced elastic modulus of the MLs were studied.
