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Microstructure and mechanical properties of Fe-N/TiN magnetic multilayers with different thickness of TiN layers

Microstructure and mechanical properties of Fe-N/TiN magnetic multilayers with different thickness of TiN layers
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摘要 Fe-N/TiN multilayers (MLs) with different thickness of TiN layers and 20nm thickness ofFe-N layers deposited by DC magnetron sputtering technique were studied. The structure andcomposition of MLs were characterized with low-angle X-ray diffraction (LXRD), Augur depth pro-file and X-ray diffraction (XRD). The hardness and reduced elastic modulus of these multilayerswere studied using a nano-hardness tester (NHT). The bonding strength between the MLs and thesubstrate was measured using a nano-scratch tester (NST). Effects of the thickness of the TiNlayer on critical load, hardness and reduced elastic modulus of the MLs were studied. Fe-N/TiN multilayers (MLs) with different thickness of TiN layers and 20nm thickness of Fe-N layers deposited by DC magnetron sputtering technique were studied. The structure and composition of MLs were characterized with low-angle X-ray diffraction (LXRD), Augur depth pro- file and X-ray diffraction (XRD). The hardness and reduced elastic modulus of these multilayers were studied using a nano-hardness tester (NHT). The bonding strength between the MLs and the substrate was measured using a nano-scratch tester (NST). Effects of the thickness of the TiN layer on critical load, hardness and reduced elastic modulus of the MLs were studied.
机构地区 Dept.of MEEM
出处 《Science China Mathematics》 SCIE 2001年第S1期375-380,共6页 中国科学:数学(英文版)
关键词 Fe-N/TiN MULTILAYER critical load HARDNESS Fe-N/TiN multilayer critical load hardness
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