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Effects of absorbing media on relative optical interference intensity ROII technique 被引量:1

Effects of absorbing media on relative optical interference intensity ROII technique
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摘要 The optical interference intensity ROll technique, which enables measurements of filmthickness of magnitude below half of the wavelength of the incident light, is widely used in thestudy of thin film lubrication (TFL). However, the absorbing characteristics of the metallic compo-nents which are for generating suitable amount of reflectance to facilitate optimum inference im-ages has never been taken into consideration. This paper presents a theoretical analysis of theabsorbing characteristics. Results indicate that without acknowledging the absorbing effects, sig-nificant errors in film thickness measurements can be induced. The optical interference intensity ROll technique, which enables measurements of film thickness of magnitude below half of the wavelength of the incident light, is widely used in the study of thin film lubrication (TFL). However, the absorbing characteristics of the metallic compo- nents which are for generating suitable amount of reflectance to facilitate optimum inference im- ages has never been taken into consideration. This paper presents a theoretical analysis of the absorbing characteristics. Results indicate that without acknowledging the absorbing effects, sig- nificant errors in film thickness measurements can be induced.
作者 P.L.Wong F.Guo
出处 《Science China Mathematics》 SCIE 2001年第S1期431-435,共5页 中国科学:数学(英文版)
关键词 RELATIVE optical INTERFERENCE INTENSITY OPTICS of METAL FILM thickness relative optical interference intensity optics of metal film thickness
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